JPH0164387U - - Google Patents
Info
- Publication number
- JPH0164387U JPH0164387U JP1987158501U JP15850187U JPH0164387U JP H0164387 U JPH0164387 U JP H0164387U JP 1987158501 U JP1987158501 U JP 1987158501U JP 15850187 U JP15850187 U JP 15850187U JP H0164387 U JPH0164387 U JP H0164387U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- plate
- model registration
- hand
- suction holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158501U JPH0511992Y2 (en]) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158501U JPH0511992Y2 (en]) | 1987-10-16 | 1987-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0164387U true JPH0164387U (en]) | 1989-04-25 |
| JPH0511992Y2 JPH0511992Y2 (en]) | 1993-03-25 |
Family
ID=31438887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987158501U Expired - Lifetime JPH0511992Y2 (en]) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511992Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0366928U (en]) * | 1989-10-31 | 1991-06-28 | ||
| JP2015201540A (ja) * | 2014-04-08 | 2015-11-12 | ウシオ電機株式会社 | 基板搬送用真空吸着アーム |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5091280U (en]) * | 1973-12-25 | 1975-08-01 | ||
| JPS5796794A (en) * | 1980-11-28 | 1982-06-16 | Ibm | Holder for article |
| JPS60138681U (ja) * | 1984-02-24 | 1985-09-13 | 株式会社日立製作所 | ウエハ−チヤツクハンド |
| JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
| JPS6245832U (en]) * | 1985-09-06 | 1987-03-19 |
-
1987
- 1987-10-16 JP JP1987158501U patent/JPH0511992Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5091280U (en]) * | 1973-12-25 | 1975-08-01 | ||
| JPS5796794A (en) * | 1980-11-28 | 1982-06-16 | Ibm | Holder for article |
| JPS60138681U (ja) * | 1984-02-24 | 1985-09-13 | 株式会社日立製作所 | ウエハ−チヤツクハンド |
| JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
| JPS6245832U (en]) * | 1985-09-06 | 1987-03-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0366928U (en]) * | 1989-10-31 | 1991-06-28 | ||
| JP2015201540A (ja) * | 2014-04-08 | 2015-11-12 | ウシオ電機株式会社 | 基板搬送用真空吸着アーム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511992Y2 (en]) | 1993-03-25 |